source url Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge.
Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
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Description. Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active. Glow Discharge Processes: Sputtering and Plasma Etching [Brian Chapman] on linawycatuzy.gq *FREE* shipping on qualifying offers. Develops detailed.
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Page 1 of 1 Start over Page 1 of 1. Principles of Plasma Discharges and Materials Processing. From the Publisher Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge.
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